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| 微牛级电磁力标定装置仿真与测试研究 |
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成烨1,2,3，龙建飞1,2,3，罗威1,2,3，王嘉彬1,2,3，黄丹1,2,3，徐禄祥1,2,3，郭宁1，杨威4
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1.国科大杭州高等研究院 基础物理与数学科学学院，浙江 杭州 310024;2.国科大杭州高等研究院 引力波太极实验室（杭州），浙江 杭州 310024;3.国科大杭州高等研究院 浙江省引力波精密测量重点实验室，浙江 杭州 310024;4.重庆科技学院 电气工程学院，重庆 401331
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| 摘要: |
如何获得高精度标定力是微牛级推力测量的重要基础。本文构建了C型磁路结构和矩形线圈组合方式以产生高精度宽范围电磁标定力。利用有限元方法分析了该装置特征区域磁场分布，对矩形线圈与磁体相对位置影响进行了讨论，最后搭建标定实验平台并进行标定实验。得到主要结论：在特征区域范围内磁场分布均匀性较好，最大差异率仅为0.7%；电流在10 μA![]() ![]() ~20.2 mA范围调节时，电磁力标定范围为0.097~237.32 μN![]() ![]() ，实验测量数据与仿真结果最大误差为1.73%；当线圈电流分辨率为10 μA![]() ![]() 时，标定力实测分辨率优于0.1 μN![]() ![]() 。 |
| 关键词: 微推力测量 微牛级 电磁力标定 系统参数标定 仿真模拟 |
| DOI：10.13675/j.cnki.tjjs.2303058 |
| 分类号:V439+.4 |
| 基金项目:国家重点研发计划（2021YFC2202700）；国科大杭州高等研究院自主项目（2022ZZ01009）；重庆市教委科学技术研项目（KJZD-K202101506）；湖南省自然科学基金（2021JJ30564）。 |
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| Simulation and testing research on micro Newton level electromagnetic force calibration device |
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CHENG Ye1,2,3, LONG Jianfei1,2,3, LUO Wei1,2,3, WANG Jiabin1,2,3, HUANG Dan1,2,3, XU Luxiang1,2,3, GUO Ning1, YANG Wei4
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1.School of Fundamental Physics and Mathematical Sciences，Hangzhou Institute for Advanced Study， UCAS，Hangzhou 310024，China;2.Gravitational Wave Universe Taiji Laboratory，Hangzhou Institute for Advanced Study， UCAS，Hangzhou 310024，China;3.Key Laboratory of Gravitational Wave Precision Measurement of Zhejiang Province， Hangzhou Institute for Advanced Study，UCAS，Hangzhou 310024，China;4.School of Electrical Engineering，Chongqing University of Science and Technology，Chongqing 401331，China
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| Abstract: |
How to obtain high-precision calibration force is an important foundation for micro Newton level thrust measurement. In this paper， a C-type magnetic circuit structure and a rectangular coil combination method are constructed to generate high-precision and wide-range electromagnetic calibration force. The magnetic field distribution in the characteristic region of the device was analyzed using the finite element method， and the influence of the relative position of the rectangular coil and the magnet was discussed. Finally， a calibration experimental platform was established and calibration experiments were conducted. The main conclusions are as follows： within the characteristic region， the magnetic field distribution uniformity is good， and the maximum difference rate is only 0.7%； When the current is adjusted in the range of 10 μA![]() ![]() to 202 mA， the calibration range of electromagnetic force is 0.097 to 237.32 μN![]() ![]() ， and the maximum error between experimental measurement data and simulation results is 1.73%； When the coil current resolution is 10 μA![]() ![]() ， the measured resolution of the calibration force is better than 0.1 μN![]() ![]() . |
| Key words: Micro-thrust measurement Micro Newton level Electromagnetic force calibration System parameter calibration Numerical simulation |
