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| MEMS冷气推力器的制作和热性能研究 |
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康宝鹏1,2,赵学聪1,2,乔大勇3,4,马志波3,4,李 昭1,2,吴树范1,2,张传鑫1,2
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(1. 上海微小卫星工程中心，上海 201203;2. 中科院微小卫星重点实验室，上海 201203;3. 西北工业大学 空天微纳系统教育部重点实验室，陕西 西安 710072;4. 西北工业大学 陕西省微/纳米系统重点实验室，陕西 西安 710072)
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| 摘要: |
| 为了研究MEMS(Micro Electro Mechanical Systems)冷气推力器的热性能，介绍了一种MEMS冷气推力器的设计和制作，该推力器体积小(40mm×20mm×1mm)，重量轻(1g)，功耗低。对推力器加热丝不同电压和环境下进行了热仿真，对组装到电路板上的推力器模块进行了热测试。结果表明:常温常压下，8V的驱动电压，经过230s后，推力器加热丝的温度可达到80℃以上，与仿真结果趋势相同，可预见真空中，8V电压下可满足推进剂对加热腔温度的需求。 |
| 关键词: MEMS 微推力器 制作 加热丝 热特性 |
| DOI： |
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| 基金项目:中科院微小卫星重点实验室开放课题基金(KFKT13SYS1)；陕西省微/纳米系统重点实验室开放课题基金 |
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| Fabrication and Thermal Property Research of MEMS-Based Cold Gas Thruster |
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KANG Bao-peng1,2,ZHAO Xue-cong1,2,QIAO Da-yong3,4,MA Zhi-bo3,4,LI Zhao1,2,WU Shu-fan1,2,ZHANG Chuan-xin1,2
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(1. Shanghai Engineering Centre for Microsatellite，Shanghai 201203，China;2. Key Lab of Microsatellites，Chinese Academy of Sciences，Shanghai 201203，China;3. Key Laboratory of Mico/Nano Systems for Aerospace，Ministry of Education，Northwestern Polytechnical University，Xi’an 710072，China;4. Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems，Northwestern Polytechnical University，Xi’an 710072，China)
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| Abstract: |
| In order to study thermal property of cold gas thruster based on MEMS(Micro Electro Mechanical Systems)，the design and fabrication of a MEMS-based cold thruster are presented. The dimension and mass of this fabricated thruster is 40mm×20mm×1mm and 1g respectively，which would be integrated into micro cold propulsion system. The thermal property of thruster heater which would be used to increase specific impulse of propulsion system was simulated and the test to verify the simulation was implemented. The results show that the heater could warm the thruster chamber up to 80℃ through 230s heating at ambient environment and 8V drive，which agree well with simulation results. Based on results in ambient environment，better thermal property of thruster heater can be expected in vacuum environment. |
| Key words: MEMS Micro thruster Fabrication Thruster heater Thermal property |
